Towne Technologies provides "Ferroxoplate", a See-Thru Iron Oxide Photoplate used for high volume imaging of wafers, PC boards, LCD's, and other electronic circuitry.
FERROXOPLATE: THE ULTIMATE SEE-THROUGH PHOTO-PLATE
Ferroxoplate is a new low cost iron oxide photoplate. The semi-transparent coating is the hardest available to the photomask maker. The physical characteristics and economy of the Ferroxoplate makes it a replacement for emulsion and chrome photomasks in contact or projection wafer printing. To see our Complete Specifications Please click here.
The substrate material is a special "drawn" soda lime glass. - Polished both sides.
The flatness is within 150 micro inches per linear inch.
The coating is extremely abrasion resistant iron oxide - 3100Aº ±5% in thickness.
Towne's proprietary manufacturing process incorporates ultra-pure raw materials. The relatively low reaction temperature eliminates distortion of the glass substrate.
Meets all spectral photoresist masking requirements-less than 1% transmission at 440 Nanometers and more than 35% at 589 Nanometers. Allows for easy alignment of light and dark field masks with excellent masking of ultraviolet. Click here for the Spectral Transmission Chart
Non-reflective surface minimizes line spreading from multiple reflections. Superior to chrome for generating micron and sub micron geometries in photo-resist with photo repeater.
All plates subjected to ultrasonic cleaning prior to inspection. Plates are inspected at 20 power for pinholes and defects. Only pinhole free plates are shipped.
Ferroxoplates available in all standard photomask sizes. Extra sizes up to 24"x32" available on special order. Thickness other than .060" on special order.
Plates are nornally coated with Shipley S-1400-30 or S-1800 photoresist. Click here for PROCESSING PROCEDURES.
Easily etched with inexpensive etchant. Uniformity of coating from lot to lot permits batch etching. Our PROCESSING PROCEDURE include the recipe for the etchant.
Regular Ferroxoplates packaged up to 30 plates per box. Specially designed rack and box allows for ease of storage and handling.
Also available, finished Ferroxoplate photomasks fabricated to your specifications in either English or metric dimensions.
·Virtually defect-free ·Highly wear-resistant ·Semi-transparent ·Sizes to 24x32 in. ·Extremely high resolution
FOR MOST APPLICATIONS, INCLUDING MIL SPEC END PRODUCTS, THE MOST COST-EFFECTIVE PHOTO-TOOL YOU CAN BUY!
FOR APPLICATIONS ADVISE OR ASSISTANCE, CONTACT TOWNE TECHNOLOGIES' ENGINEERING DEPARTMENT.
Reflectance at 420 Nanometers is 25%
Towne Technologies' Ferroxomask Iron Oxide Photomasks are virtually defect-free when you receive them. And, thanks to the great hardness of the iron oxide layer, they stay that way. Production downtime for mask repair or retouching is virtually eliminated. Compared to typical emulsion or diazo films, users report from 10 to more than 1000 times as many exposures from a single Ferroxomask. This gives you the lowest unit cost per device produced. For large panel displays,a finished Ferroxomask costs no more than raw chrome-coated glass!
Because the iron coating is only 3100A thick, and because its molecular structure is so fine, resolution is extremely high. Feature sizes as small as 1 micron are readily attainable.
Ferroxomasks are near-opaque at the 400-450 um used in photo-lithography, but semi-transparent at visible wavelengths-those around 640 um. Thus, they are easy to align visually. Or, they can be mechanically aligned-adapting to your present methods or using Towne Technologies' pin alignment system.
Every Towne Ferroxomask is produced under strictest quality standards. From the selected float-glass substrates through the many steps of polishing to an optical finish, iron-oxide deposition, cutting to size, photoresist application, baking, exposure, developing, and etching, the Ferroxomask is kept under Class 100 clean room conditions and checked for quality and coating integrity at every step Even before spotting, voids and defects seldom exceed five in a 24"x32" mask!
Should the Iron oxide need to be repaired due to defects picked up in the printing process, or from a defective master, repair is an easy process.
Towne is the pioneer in large-size iron oxide photomasks and a world leader in the production of all forms of photo-tools. Our experience of over 25 years is available to help you; just phone or write for engineering assistance, samples, or sample tooling. Towne is your best source of advice on the preparation of original art, and on the use of photo-tools to maximize productivity and minimize downtime. Towne can also assist with artwork preparation. Remember, before you make a decision on photo-tooling, contact Towne Technologies' Engineering Department at the address and phone above.
SERVING INDUSTRY FOR OVER 45 YEARS
Processing Procedures (and etchant recipe)
Details on S1800 Photoresist from Rohm & Haas (formerly Shipley Corp.)
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